JPH03101409U - - Google Patents
Info
- Publication number
- JPH03101409U JPH03101409U JP1042790U JP1042790U JPH03101409U JP H03101409 U JPH03101409 U JP H03101409U JP 1042790 U JP1042790 U JP 1042790U JP 1042790 U JP1042790 U JP 1042790U JP H03101409 U JPH03101409 U JP H03101409U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer stage
- correction mechanism
- mask
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1042790U JPH03101409U (en]) | 1990-02-05 | 1990-02-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1042790U JPH03101409U (en]) | 1990-02-05 | 1990-02-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03101409U true JPH03101409U (en]) | 1991-10-23 |
Family
ID=31513997
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1042790U Pending JPH03101409U (en]) | 1990-02-05 | 1990-02-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03101409U (en]) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10270305A (ja) * | 1997-03-26 | 1998-10-09 | Nikon Corp | 露光方法 |
| JP2002353119A (ja) * | 2001-05-28 | 2002-12-06 | Oki Electric Ind Co Ltd | 自動焦点装置 |
| JP2006237395A (ja) * | 2005-02-25 | 2006-09-07 | Toshiba Mach Co Ltd | 転写装置 |
| JP2010133824A (ja) * | 2008-12-04 | 2010-06-17 | Kirin Brewery Co Ltd | キャップ検査装置及びキャップ検査方法 |
| JP2011158441A (ja) * | 2010-02-04 | 2011-08-18 | Nec Engineering Ltd | 薄膜の傾き測定装置及び傾き測定方法 |
| JP2017185511A (ja) * | 2016-04-04 | 2017-10-12 | 三菱重工業株式会社 | レーザ加工方法およびレーザ加工装置 |
-
1990
- 1990-02-05 JP JP1042790U patent/JPH03101409U/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10270305A (ja) * | 1997-03-26 | 1998-10-09 | Nikon Corp | 露光方法 |
| JP2002353119A (ja) * | 2001-05-28 | 2002-12-06 | Oki Electric Ind Co Ltd | 自動焦点装置 |
| JP2006237395A (ja) * | 2005-02-25 | 2006-09-07 | Toshiba Mach Co Ltd | 転写装置 |
| JP2010133824A (ja) * | 2008-12-04 | 2010-06-17 | Kirin Brewery Co Ltd | キャップ検査装置及びキャップ検査方法 |
| JP2011158441A (ja) * | 2010-02-04 | 2011-08-18 | Nec Engineering Ltd | 薄膜の傾き測定装置及び傾き測定方法 |
| JP2017185511A (ja) * | 2016-04-04 | 2017-10-12 | 三菱重工業株式会社 | レーザ加工方法およびレーザ加工装置 |